JPH0117244B2 - - Google Patents

Info

Publication number
JPH0117244B2
JPH0117244B2 JP59045565A JP4556584A JPH0117244B2 JP H0117244 B2 JPH0117244 B2 JP H0117244B2 JP 59045565 A JP59045565 A JP 59045565A JP 4556584 A JP4556584 A JP 4556584A JP H0117244 B2 JPH0117244 B2 JP H0117244B2
Authority
JP
Japan
Prior art keywords
wafer
cover
quartz
holding device
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59045565A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60189930A (ja
Inventor
Shinji Okumura
Yasumi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP4556584A priority Critical patent/JPS60189930A/ja
Publication of JPS60189930A publication Critical patent/JPS60189930A/ja
Publication of JPH0117244B2 publication Critical patent/JPH0117244B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP4556584A 1984-03-12 1984-03-12 ウエハ−保持装置 Granted JPS60189930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4556584A JPS60189930A (ja) 1984-03-12 1984-03-12 ウエハ−保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4556584A JPS60189930A (ja) 1984-03-12 1984-03-12 ウエハ−保持装置

Publications (2)

Publication Number Publication Date
JPS60189930A JPS60189930A (ja) 1985-09-27
JPH0117244B2 true JPH0117244B2 (en]) 1989-03-29

Family

ID=12722869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4556584A Granted JPS60189930A (ja) 1984-03-12 1984-03-12 ウエハ−保持装置

Country Status (1)

Country Link
JP (1) JPS60189930A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634935A1 (de) * 1986-10-14 1988-04-28 Heraeus Schott Quarzschmelze Vertikalhorde
JPH029426U (en]) * 1988-06-30 1990-01-22
JPH0831427B2 (ja) * 1989-12-28 1996-03-27 東芝セラミックス株式会社 スタッキングボート
JP2606932Y2 (ja) * 1992-06-29 2001-02-19 株式会社福井信越石英 縦型ウエーハ保持ボート

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145771U (en]) * 1976-04-27 1977-11-04
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS543647U (en]) * 1977-06-11 1979-01-11
JPS5812730A (ja) * 1981-07-15 1983-01-24 Kurabo Ind Ltd 折り曲げ硬質発泡体複合板の製造方法
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles
JPS58108735A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 縦型反応管用バスケツト
JPS5918434U (ja) * 1982-07-27 1984-02-04 株式会社東芝 半導体基板用加熱支持台

Also Published As

Publication number Publication date
JPS60189930A (ja) 1985-09-27

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